Robot Structural Analysis Professional 2010 Xforce Crack [REPACK] Free Download
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Feb 25, 2018. How to download and install office professional office 2013 in windows 7. Autodesk Revit Architecture 2013 x64 free download, Autodesk Vault 1.0.. Revit 2013 Crack. Autodesk Infinity Architect 2012 Crack 2.21 Free Download.1. Field of the Invention
The present invention relates to a process for the production of a semiconductor device and more particularly, to a process for the production of a semiconductor device, which comprises depositing a high-melting-point metal on the surface of a substrate of a semiconductor material and then heating and annealing the surface of the substrate.
2. Description of the Related Art
Recently, various processes have been developed and the development of the processes and the apparatuses for a production of semiconductor devices with a high integration degree and a high degree of function has progressed. Particularly, in a process for producing a semiconductor device using a nitride semiconductor such as a GaN based semiconductor, a simple and inexpensive apparatus and a reliable process are strongly required.
As a method of producing a nitride semiconductor, a method of growing a nitride semiconductor as thin as several.mu.m or less is known. However, when a nitride semiconductor is formed on a substrate, it is difficult to reduce contamination of the surface of the nitride semiconductor. To prevent contamination of the surface of a semiconductor, a crystal growth apparatus including a shower head to supply a growth raw gas is used in a growth process. The contamination of the surface of the nitride semiconductor can be prevented by supplying a moisture to the surface of the semiconductor.
The above conventional production process includes, e.g., a process for producing a heterojunction bipolar transistor disclosed in Japanese Patent Laid-open Publication No. 61-255743, in which a heated substrate is held by a chuck and the substrate is heated to a temperature at which the semiconductor is nitrided by supplying a reactive gas while the substrate is held at a pressure of 5 Torr or higher.
When the temperature of a substrate is not sufficiently raised in the above conventional process, nitrogen contained in the reactive gas is not
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