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Patent Document 1 discloses a plasma processing apparatus in which a cooling medium is supplied to the substrate processing chamber to cool the substrate processing chamber after the completion of the processing and the substrate processing chamber is maintained in a vacuum state or a vacuum atmosphere is introduced into the processing chamber.
In the plasma processing apparatus disclosed in Patent Document 1, the processing chamber is heated by an external heater. For example, the external heater is heated by electrical power supplied from an external power source. Alternatively, the external heater may be heated by radiant heat of plasma generated in the plasma processing apparatus. If the heater is in operation, the temperature of the substrate processing chamber can be maintained at a predetermined temperature.
In the plasma processing apparatus, the substrate processing chamber is cooled by the external heater while the substrate processing chamber is maintained in the vacuum state or the vacuum atmosphere. Since an increase in the temperature of the substrate processing chamber in a short period of time results in a decrease in the processing capacity of the plasma processing apparatus, it is desirable to suppress the temperature rise in the substrate processing chamber.
Japanese Patent Laid-Open Publication No. 2003-152178 discloses a plasma processing apparatus that includes a heating apparatus for heating a reaction vessel in which a substrate to be processed is disposed. In this plasma processing apparatus, a heating apparatus is in operation during a reaction process in order to reduce the time taken for the substrate to be processed to reach a predetermined temperature./*
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